OMRON: Release MEMS thermal flow-type differential pressure sensor
KYOTO, Japan -- OMRON Corporation (TOKYO: 6645, ADR: OMRNY) today announced the release on March 21 of the D6F-PH MEMS differential pressure sensor1 featuring Omron's newly-developed cutting-edge MEMS thermal flow sensor chip.
The D6F-PH is a thermal flow-type sensor meaning it is capable of measuring with superior sensitivity and reproducibility in low pressure environments and with a wider pressure range than the commonly-used capacitance-type and piezoelectric-type differential pressure sensors. Embedded ASICs carry out digital correction (linearity and temperature correction) making the D6F-PH more precise and less influenced by temperature than conventional analog output sensors.
The D6F-PH will make it possible to optimize business and household air conditioning and ventilation control in order to maximize energy efficiency, and also increase the accuracy of gas flow control and monitoring in digital medical equipment such as anesthetic machines and respirators.
1 How differential pressure sensors measure flow rates
A constriction is created in a flow channel inside the sensor which causes an overall drop in pressure in the fluid or gas being measured. Since this drop in pressure is related to the density and flow velocity of the fluid or gas being measured, comparing the difference in pressure upstream and downstream from the constriction makes it possible for pressure sensors to measure flow rates.
Features
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High precision measurement
The D6F-PH features a new digital correction algorithm that achieves 3% RD precision, contributing to optimization of control efficiency. -
High flow impedance to reduce the influence of bypass configuration
By increasing the sensor's flow resistance, the influence of bypass pipe length and diameter has been reduced, leading to more stable measurement. -
Reduced size increases installation flexibility
The sensor's dimensions were reduced to 26mm x 22mm x 18mm thanks to a new flow channel design that makes full use of the latest flow analysis technology. The reduction of the circuit board footprint will contribute to the reduction of system sizes. -
Anomaly detection
Sensor element "open," "short circuit," and "power supply voltage" anomaly detection provides greatly enhanced reliability.
Specifications/performance
| Model | D6F-PH0025AD1 | D6F-PHO505AD3 | D6F-PH5050AD3 |
|---|---|---|---|
| Measurement range (see note 1) | 0 to 250Pa | +/-50Pa | +/- 500Pa |
| Calibration gas (see note 2) | Air | ||
| Port type | Barb joint, maximum outside diameter: 4.9mm | ||
| Power supply | 2.3 to 3.6 VDC | ||
| Current consumption |
20mA max. With no load and Vcc of 3.3 VDC, GND=OVDC, 25 degree C |
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| Resolution | 12 bit | ||
| Zero point toleration | +/- 0.2Pa | ||
| Span tolerance | +/- 3%R.D. | ||
| Temperature compensation | Yes | ||
| Span shift due to temperature variation | <+/-0.5% R.D. per 10 degree C | ||
| Response time |
25ms typical at 12 bit resolution (50ms maximum) The processing time is 6ms typical at 12 bit resolution |
||
| Gas flow through sensor | <63mL/min | <23mL/min | <100mL/min |
| Interface | I2C | ||
| Case material | PPS | ||
| Degree of protection | IEC IP40 | ||
| Withstand pressure | 10kPa | ||
| Operating temperature | -20 to +80 degrees C (with no condensation or icing) | ||
| Operating humidity | 35% to 80% RH (with no condensation or icing) | ||
| Storage temperature | -40 to +80 degrees C (with no condensation or icing) | ||
| Storage humidity | 35% to 80% RH (with no condensation or icing) | ||
| Insulation resistance |
Between sensor outer cover and lead terminals: 20Ω min (500VDC) |
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| Dielectric strength |
Between sensor outer cover and lead terminals: 500VAC, 50/60Hz min. for 1 minute (leakage current: 1mA max.) |
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| Weight | 5.2g | ||